| 000 | 00793pam a2200265 a 4500 | ||
|---|---|---|---|
| 008 | |||
| 020 | _a0471924784 (pbk.) | ||
| 049 | _aMAIN | ||
| 090 |
_aTK7871.85 _bMOR |
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| 100 | 1 | _aMorgan, D. V. | |
| 245 | 1 | 3 |
_aAn introduction to semiconductor microtechnology / _cD.V. Morgan and K. Board. |
| 250 | _a2nd ed. | ||
| 260 |
_aChichester : _bWiley, _cc1990. |
||
| 300 |
_axiv, 208 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references. | ||
| 500 | _aIncludes index. | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction. |
|
| 653 | _aSemiconductor devices. | ||
| 700 | 1 | _aBoard, K. | |
| 907 |
_a.b10064953 _b09-04-13 _c17-04-03 |
||
| 003 | |||
| 005 | 20230123134150.0 | ||
| 040 | _cNUST | ||
| 942 |
_cBOOKS _kTK7871.85 _mMOR |
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| 999 |
_c161169 _d161169 |
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