TY  - BOOK
AU  - Morgan,D.V.
AU  - Board,K.
TI  - An introduction to semiconductor microtechnology
SN  - 0471924784 (pbk.)
PY  - 1990///
CY  - Chichester
PB  - Wiley
KW  - Semiconductors
KW  - Design and construction
KW  - Semiconductor devices
N1  - Includes index; Includes bibliographical references
ER  -