Morgan, D. V. <br/><br/>
An introduction to semiconductor microtechnology / 
D.V. Morgan and K. Board. 
 - 2nd ed. 
 - Chichester :  Wiley,  c1990. 
 - xiv, 208 p. :  ill. ;  24 cm. 
<br/><br/> Includes index. 
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>0471924784 (pbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction.
<br/><br/><label>Subjects--Index Terms: </label>Semiconductor devices.