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  <titleInfo>
    <title>Properties of metal silicides</title>
  </titleInfo>
  <name type="personal">
    <namePart>Maex, Karen.</namePart>
  </name>
  <name type="personal">
    <namePart>Rossum, Marc van.</namePart>
  </name>
  <name type="corporate">
    <namePart>Institution of Electrical Engineers</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <originInfo>
    <place>
      <placeTerm type="text">London</placeTerm>
    </place>
    <publisher>INSPEC</publisher>
    <dateIssued>c1995</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>xiv, 335 p. : ill. ; 29  cm.</extent>
  </physicalDescription>
  <note type="statement of responsibility">edited by Karen Maex and Marc van Rossum.</note>
  <note>Includes index.</note>
  <subject authority="lcsh">
    <topic>Silicides</topic>
  </subject>
  <subject>
    <topic>Circuits</topic>
  </subject>
  <relatedItem type="series">
    <titleInfo>
      <title>EMIS datareviews series ; no. 14</title>
    </titleInfo>
  </relatedItem>
  <identifier type="isbn">0852968590 (hbk.)</identifier>
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    <recordCreationDate encoding="marc">      </recordCreationDate>
    <recordChangeDate encoding="iso8601">20230123133132.0</recordChangeDate>
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