Laser chemical processing for microelectronics /
Laser chemical processing for microelectronics /
edited by K.G. Ibbs, R.M. Osgood.
- Cambridge : Cambridge University Press, 1989.
- 172 p. : ill. ; 24 cm.
- Cambridge studies in modern optics ; 7 .
Includes index.
Includes bibliographical references.
0521322545 (hbk.)
Integrated circuits--Design and construction.
Lasers--Industrial applications.
Includes index.
Includes bibliographical references.
0521322545 (hbk.)
Integrated circuits--Design and construction.
Lasers--Industrial applications.